Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography

نویسندگان

  • S. D. Kovaleski
  • R. M. Gilgenbach
  • L. K. Ang
  • Y. Y. Lau
چکیده

The dynamics of electron beam ablation plumes have been characterized through the application of dye laser resonance absorption photography. The ablation of fused silica by a channelspark electron beam was studied by probing the near-ground state, 3p D24s P neutral Si transition at 288.158 nm. Necessary background gases ~Ar or N2) were tested at pressures of 15 or 30 mTorr. A two-lobed, Si atom plume shape was discovered that is hydrodynamically more complex than laser ablation plumes. These plumes merge into a single-lobed plume at about 400 ns after the e-beam current pulse rise. Plume front expansion velocities of Si atoms were measured at nearly 1 cm/ms, and are comparable to the expansion of laser ablated metal atom plumes with laser fluences of a few J/cm. © 1998 American Institute of Physics. @S0003-6951~98!02444-9#

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تاریخ انتشار 1998